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Journal Article

Nanochannel Array Glass

R. J. Tonucci, B. L. Justus, A. J. Campillo and C. E. Ford
Science
New Series, Vol. 258, No. 5083 (Oct. 30, 1992), pp. 783-785
Stable URL: http://www.jstor.org/stable/2880327
Page Count: 3
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Nanochannel Array Glass
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Abstract

The fabrication and characterization of a glass containing a regular parallel array of submicrometer channels or capillaries are described. The capillaries are arranged in a two-dimensional hexagonal close packing configuration with channel diameters as small as 33 nanometers and packing densities as high as 3 x 10$^{10}$ channels per square centimeter. The high-temperature stability of the nanochannel glass array is well suited as a host or template for the formation of quantum confined semiconductor structures or as a mask for massively parallel patterned lithographic applications.

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