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X-Ray Emission Analysis in the Electron Microscope

D. A. Jefferson
Philosophical Transactions of the Royal Society of London. Series A, Mathematical and Physical Sciences
Vol. 305, No. 1491, Recent Advances in Analytical Chemistry (Jul. 5, 1982), pp. 535-543
Published by: Royal Society
Stable URL: http://www.jstor.org/stable/37115
Page Count: 13
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X-Ray Emission Analysis in the Electron Microscope
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Abstract

The technique by which sample-emitted X-rays are recorded in the electron microscope is assessed. Although the method is relatively insensitive for elements of low atomic number, its applicability in the field of simultaneous structural and compositional investigations is discussed, together with a critical examination of the analytical precision possible. Various examples of its use are described, including some where structure and stoichiometry can be determined in crystals containing fewer than 1010 atoms.

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